Seligson, Joel L.: search on Z-Library

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1

SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Integrated Circuit Metrology, Inspection, and Process Control VII - Phase image metrology with a modified coherence probe microscope

Nyyssonen, Diana, Seligson, Joel L., Mazor, Isaac, Postek, Michael T.

Year:

1993

Language:

english

File:

PDF, 536 KB

english, 1993

2

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Overlay accuracy in 0.18-μm copper dual-damascene process

Schulz, Bernd, Levinson, Harry J., Seltmann, Rolf, Seligson, Joel L., Izikson, Pavel, Ronen, Anat, Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 127 KB

english, 2002

3

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - TIS-WIS interaction characterization on overlay measurement tool

Hoshi, Kenji, Kawamura, Eiichi, Morohoshi, Hiroshi, Ina, Hideki, Fujimura, Takanori, Kurita, Hiroyuki, Seligson, Joel L., Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 578 KB

english, 2002

4

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Overlay metrology simulations: analytical and experimental validations

Seligson, Joel L., Golovanevsky, Boris, Poplawski, Jorge M., Adel, Michael E., Silver, Richard M., Herr, Daniel J.

Year:

2003

Language:

english

File:

PDF, 717 KB

english, 2003

5

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Overlay accuracy: a metal layer study

Habermas, Andrew, Ferguson, Bradley A., Seligson, Joel L., Kassel, Elyakim, Izikson, Pavel, Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 111 KB

english, 2002

6

Absorber-induced features in the ac response of a He-Ne laser

Joel Seligson, Rainer Salomaa, Stig Stenholm

Journal:

Optics Communications

Year:

1976

Language:

english

File:

PDF, 192 KB

english, 1976

7

Prism couplers in guided-wave optics: design considerations

Journal:

Year:

1987

Language:

english

File:

PDF, 287 KB

english, 1987

8

Modeling of a focusing grating coupler using vector scattering theory

Journal:

Year:

1988

Language:

english

File:

PDF, 827 KB

english, 1988

9

Science not yet without borders

Seligson, Joel, Friedman, Victor J.

Journal:

Year:

2008

Language:

english

File:

PDF, 226 KB

english, 2008

10

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - Target noise in overlay metrology

Seligson, Joel L., Silver, Richard M., Adel, Mike E., Izikson, Pavel, Levinski, Vladimir, Yaffe, Dan

Year:

2004

Language:

english

File:

PDF, 410 KB

english, 2004

11

Buried diffraction gratings: a phenomenological theory

Seligson, Joel, Baumeister, Philip

Journal:

Year:

1979

Language:

english

File:

PDF, 324 KB

english, 1979

12

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Metrology, Inspection, and Process Control for Microlithography XIX - Overlay mark performance: a simulation study

Frommer, Aviv, Silver, Richard M., Seligson, Joel L.

Year:

2005

Language:

english

File:

PDF, 438 KB

english, 2005

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Diffraction order control in overlay metrology: a review of the roadmap options

Adel, Mike, Allgair, John A., Raymond, Christopher J., Kandel, Daniel, Levinski, Vladimir, Seligson, Joel, Kuniavsky, Alex

Year:

2008

Language:

english

File:

PDF, 745 KB

english, 2008

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